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HOME > About Us > The World of Nanometer: the Discovery of the New Frontiers of Microprocess Technology

The World of Nanometer: the Discovery of the New Frontiers of Microprocess Technology

In many of the familiar industrial products that surround us, microprocess technology plays a vital role in parts that are too small to be seen with the naked eye.
Tokyo Ohka Kogyo Co., Ltd. (TOK) always pushes at the boundaries of those cutting-edge technologies found in the fields of semiconductor, liquid crystal display; it uses the microprocess technology based on photolithography as the core of TOK's technological developments. As microprocess technology TOK developed “photoresist” and now manufactures a wide range of photoresist; photoresist is indispensable for the photolithography process. TOK started from this microprocess technology and is now expanding into many new fields.

Cellular phones, flat-screen televisions, personal computers, and vehicles.
It's not only the smart exterior designs that are evolving everyday, but also the hidden interiors of the many kinds of industrial products that surround us.
Microprocess technology with “photolithography” at its heart enriches all our lives, more convenient, comfortable and prosperous.

What Is Photolithography?

Photolithography works using similar principles to photography. It uses light to carry out ultrafine microscopic processing.
TOK provides materials such as photoresist and high purity chemicals, and manufacturing equipment including photoresist coating equipment, used in the photolithography process.

Overview of Photolithography Process (example of how photoresist is used in the semiconductor manufacturing process)

In the semiconductor manufacturing process, repetition from Process 2 to Process 11 is the photolithography process:
Silicon Wafer Coat of Photoresist

A photosensitive resin, photoresist is coated.

Cross Section of Silicon Wafer
Process 1 Process 2 Process 3
Etching

The part with the photoresist pattern formed by the development as a protective film is not etched, and the part without photoresist is etched.

Development

In the same way as a photograph is developed, the process of development forms photoresist patterns of the exposed design drawing.

Exposure

A photomask (design drawing) is transcribed onto the photoresist in the similar way as a photograph is printed onto photographic paper.

Process 6 Process 5 Process 4
Removal of Photoresist

After processing, used photoresist is removed.

Coat of an Agent for Diffusing Dopants

An agent that diffuses dopants is coated.

Formation of Semiconductor Area

After the diffusing agent has been coated, a semiconductor area is created by high-temperature baking.

Process 7 Process 8 Process 9
Completion of an Integrated Circuit on the Wafer

Integrated circuits cover the wafer processed by microprocess technology.

Formation of Integrated Circuits

By repeating these processes, a variety of different types of circuits and then integrated circuits are made.

Formation of Wiring

Processing including photoresist coating, exposure, development, and etching is carried out and form wiring which is made of aluminum or copper.

Process 12 Process 11 Process 10
Dicing a Wafer

The wafer is diced into chips.

IC Chip

Each piece of the diced wafer is an IC chip.

Completion of LSI
Process 13 Process 14 Process 15
* In the semiconductor photolithography process, different types of processing including etching are carried out repeatedly with photoresist patterns formed on a silicon wafer.
After integrated circuits are completed on the wafer, chips that are the brain of an IC or LSI are made by slicing the wafer (dicing). By packaging the chips, an IC or LSI is completed.

What can we make contribute to their advancement by using Microprocess Technology?

Microprocess technology based on photolithography is used in many fields to manufacture a surprising range of products. In recent years, microprocess technology has truly become microscopic and entered the nanometrical world; such cutting-edge microprocess technology is now indispensable for the prosperous modern day living. The following products give a good idea of the broad range of goods that have evolved by using TOK microprocess technology.

What can we make contribute to their advancement by using Microprocess Technology?

TOK technology is also used in the following products:

  • Digital cameras
  • DVD recorders
  • Computer games
  • Wrist watches
  • Airplanes

The World of Microprocess Technology: the Nanometric Frontier

It is in the field of semiconductor manufacturing that microprocess technology has developed most advanced; a processing accuracy of a single nanometer (nm) is needed. Just how big is a nanometer? For example, assuming that an AA battery is set up on the Earth, one nm has the same diameter as an AA battery in relation to the diameter of the Earth. Ultrafine processing technologies with an accuracy of molecular level are now needed in the field of semiconductor manufacturing.

A nanometer (nm) is one millionth of a millimeter.
When diameter of the earth is supposed 1 meter, the diameter of AA battery is approximately 1 nanometer (nm).

TOK will continue to explore the nanometric frontiers of advanced microprocess technology and continue to make its contribution to the betterment of humankind and the sustainable development of society in the future.

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