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A photosensitive resin, photoresist is coated. |
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The part with the photoresist pattern formed by the development as a protective film is not etched, and the part without photoresist is etched. |
In the same way as a photograph is developed, the process of development forms photoresist patterns of the exposed design drawing. |
A photomask (design drawing) is transcribed onto the photoresist in the similar way as a photograph is printed onto photographic paper. |
After processing, used photoresist is removed. |
An agent that diffuses dopants is coated. |
After the diffusing agent has been coated, a semiconductor area is created by high-temperature baking. |
Integrated circuits cover the wafer processed by microprocess technology. |
By repeating these processes, a variety of different types of circuits and then integrated circuits are made. |
Processing including photoresist coating, exposure, development, and etching is carried out and form wiring which is made of aluminum or copper. |
The wafer is diced into chips. |
Each piece of the diced wafer is an IC chip. |
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| * | In the semiconductor photolithography process, different types of processing including etching are carried out repeatedly with photoresist patterns formed on a silicon wafer. After integrated circuits are completed on the wafer, chips that are the brain of an IC or LSI are made by slicing the wafer (dicing). By packaging the chips, an IC or LSI is completed. |
Microprocess technology based on photolithography is used in many fields to manufacture a surprising range of products. In recent years, microprocess technology has truly become microscopic and entered the nanometrical world; such cutting-edge microprocess technology is now indispensable for the prosperous modern day living. The following products give a good idea of the broad range of goods that have evolved by using TOK microprocess technology.

TOK technology is also used in the following products:





It is in the field of semiconductor manufacturing that microprocess technology has developed most advanced; a processing accuracy of a single nanometer (nm) is needed. Just how big is a nanometer? For example, assuming that an AA battery is set up on the Earth, one nm has the same diameter as an AA battery in relation to the diameter of the Earth. Ultrafine processing technologies with an accuracy of molecular level are now needed in the field of semiconductor manufacturing.

TOK will continue to explore the nanometric frontiers of advanced microprocess technology and continue to make its contribution to the betterment of humankind and the sustainable development of society in the future.