Semiconductor Manufacturing Field
Microprocess technology, such as photoresist,
is supporting advancement in the electronics field.
From micrometer to cutting-edge nanometer features, TOK provides optimal photoresists and related equipment tailored to the production of various semiconductor devices
Coating machines
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CS series
Spin coaters with high functionality achieving cost effectiveness.
- Applicable to 100 / 125 / 150 / 200 / 300 mm Wafers
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SOD / Photoresist Spin Coater TR6133UD
- Applicable to 75 / 100 / 125 / 150 / 200 mm Wafers
Developing machines
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CSH series
Automatic developing machines for single wafer processing with excellent production efficiency.
- Applicable to 150 / 200 / 300 mm Wafers
Vacuum UV hardning machines
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TVC-8000 series
Vacuum UV hardening machines with better heat resistance, etching property and plating resistance.
- Applicable to 100 / 125 / 150 / 200 mm Wafers
Chemical supply system
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Automatic Developer Diluting and Supplying Machine TAS-1000 series
Chemical supply system that automatically conduct dilution and concentration controlling, focusing on the cost advantage of using a large volume of developing solution.
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Automatic Developer Concentration Controlling and Supplying Machine TADR-2000 series
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Automatic Chemical Supplying Machine OS series