SAFIER Transistors and wiring are becoming increasingly small, while the scale of integration and speed of semiconductor devices is ever increasing. SAFIER is a landmark of ultrahigh-resolution technology; it transcends intergenerational boundaries, and so extends the service life of the existing exposure wave lengths. Any process using SAFIER is technology at the very cutting-edges of extreme miniaturization. SPINLESS Our coater “Spinless” developed through non-spin process invented uniquely by TOK has made possible high-precision photoresist coating and paved the way for coating the larger size LCD glass substrates in the fifth and succeeding generations, which have proved difficult to coat using the convensional spin process. Materials for Nano Imprint As one of our micro patterning solutions, we would like to introduce new material technology by using the room temperature imprint. We have been studying the technology toward the practical use in varieties of applications.

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