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HOME > News Release > Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Japan 2001

News Release

[ November/09/2001 ]
Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Japan 2001

This exhibition was successfully ended. We are grateful to you for your visiting our booth.

Exhibit Dates : Wednesday, December 5 - Friday, December 7, 2001
Exhibit Products :
State of the Art Photoresists for Semiconductor
  • For Electron Beam (Positive Type / Negative Type)
  • For F2 Laser (157nm)
  • For ArF Excimer Laser (193nm)
  • For CARL Process
Photoresists for Semiconductor
  • For KrF Excimer Laser (248nm) (HAER / LAER / For Implant Process / Negative Type)
  • For Advanced i-line Process
Other Products for Semiconductor
  • Etching Residues Stripping Solution
  • Anti-Reflective Coating (Photoresist-Surface Coating Type)
  • Anti-Reflective Coating on the Bottom Layer of Photoresist
Low-k Materials & Equipment for Low-k Materials
  • Low-k Spin on Inorganic Planarization Source
  • Low-k Spin on Organic Planarization Source
  • Stripping Solution for Low-k Materials
  • Spin-Coater for Low-k Materials
  • Ashing Machine for Low-k Materials
Process Equipment for Semiconductor
  • Low-Damage Ashing Machine for 300mm Wafer
  • Low-Damage Ashing Machine for 200mm Wafer
  • Low-Damage Etching Machine for 200mm Wafer
  • Spin Coater for 300mm Wafer
  • Spin Coater for 200mm Wafer
Photoresists & Equipment Respond to Package Modules
  • Photoresists for Wafer Level CSP
  • Photoresists for Interposer (Tape) Type CSP
  • High Aspect Ratio Performance Photoresists
  • Dry Film Laminator for Wafer Level CSP
  • Cover Film Remover for Wafer Level CSP