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HOME > News Release > Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Korea2002

News Release

[ January/09/2002 ]
Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Korea2002

This exhibition was successfully ended. We are grateful to you for your visiting our booth.

Exhibit Dates : Tuesday, February 5 - Thursday, February 7, 2002
Exhibit Products :
State of the Art Photoresists for Semiconductor
  • For Electron Beam (EPL / Mask)
  • For F2 Laser (157nm) (Bi-Layer / Hard Mask)
  • For ArF Excimer Laser (193nm)
Photoresists for Semiconductor
  • For KrF Excimer Laser (248nm) (HAER / LAER / For Implant Process)
  • For Advanced i-line Process (High-performance / For Implant Process)
Other Products for Semiconductor
  • Etching Residues Stripping Solution
Low-k Materials & Equipment for Low-k Materials
  • Low-k Spin on Inorganic Planarization Source
  • Low-k Spin on Organic Planarization Source
  • Stripping Solution for Low-k Materials
  • Spin-Coater for Low-k Materials
  • Ashing Machine for Low-k Materials
Process Equipment for Semiconductor
  • Low-Damage Ashing Machine for 300mm Wafer
  • Low-Damage Ashing Machine for 200mm Wafer
  • Spin Coater for 300mm Wafer
  • Spin Coater for 200mm Wafer
  • Furnace for 300mm Wafer
Photoresists for Package Module
  • For Wafer Level CSP
  • For Interposer (Tape) Type CSP
Photoresists for Flat Panel Display
  • For TFT LCD
  • For Forming Black Matrix of Color Filter
  • For TN / STN LCD
  • For Forming Barrier Rib of PDP (DFR)
  • For Forming Electrode of PDP (DFR)
  • For Forming Electrode of FED
  • For Forming cathode separator of EL Display
Other Products for Flat Panel Display
  • Stripping Solution
  • Photoresist Developing Solution
  • EBR Thinner
Process Equipment for Flat Panel Display
  • Spin Coater System for Large Square Substrate
    (Applicable to 1100 by 1250mm class substrate to 370 by 470mm class substrate)
  • Spin Coater / Developer System for Large Square Substrate
    (Applicable to 650 by 750mm class substrate)
Contact :
Materials for Semiconductor
Electronic Material Marketing Division 2
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Process Equipment for Semiconductor / Flat Panel Display
Semiconductor & LCD Equipment Marketing Division
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Materials for Flat Panel Display
Display Material Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022
Materials for Package Module
Image-forming Products Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022

* Business Hours 8:45 - 12:00 13:00 - 17:30 in Japan
(Except for Saturday, Sunday, National Holidays and Our Company Holidays)