
- [ January/09/2003 ]
- Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Korea2003
This exhibition was successfully ended. We are grateful to you for your visiting our booth.
| Exhibit Dates : |
Tuesday, January 21 - Thursday, January 23, 2003 |
| Exhibit Products : |
- State of the Art Photoresists for Semiconductor
- For Electron Beam (EPL / Cr Mask)
- For F2 Excimer Laser (157nm)
- For ArF Excimer Laser (193nm)
- For KrF Excimer Laser (248nm) (HAER / LAER)
- Low-k Materials & Equipment for Low-k Materials
- Low-k Spin-on Planarization Source
- Stripping Solution for Low-k Materials
(Etching Residues [Contains Si / Cu], Photoresist / Etching Residues [Contains Si / Cu])
- Spin-Coater for Low-k Materials
- Ashing Machine for Low-k Materials
- Process Equipment for Semiconductor
- Low-Damage Ashing Machine for 300mm Wafer
- Low-Damage Ashing Machine for 200mm Wafer
- Low-Damage Etching Machine for 200mm Wafer
- Spin Coater for 300mm Wafer
- Spin Coater for 200mm Wafer
- Thick Film Forming Coater / Developer
- Multi-usage Coater / Developer
- Photoresists & Equipment for Package Modules
- Photoresists for Wafer Level CSP
(Metal Post / Bump / Re-Wiring)
- hotoresists for COF / Tape CSP / TAB
(Cu Wiring / Through-Hole Filling-in Process[Back Coat])
- Thick Film Forming Coater / Developer for CSP
- Photoresists for Flat Panel Display
- For TFT LCD
- For Forming Black Matrix of Color Filter
- For Forming Barrier Rib of PDP (DFR)
- For Forming Cathode Separator (Reverse Taper Shape) of Organic ELD EL Display
- Process Equipment for Flat Panel Display
- Spinless™ Coater System
(Applicable to 1100 by 1300mm class substrate)
- Coat & Spin® Coater System
(Applicable to 1100 by 1300mm class substrate)
- Coat & Spin® Coater / Developer System
(Applicable to 730 by 920mm class substrate)
- Coat & Spin® Coater System
(Applicable to 850 by 1000mm / 730 by 920mm / 650 by 750mm / 450 by 550mm / 370 by 470mm class substrate)
|
| Contact : |
- Materials for Semiconductor
- Electronic Material Marketing Division 2
TEL. +81-44-435-3001 FAX. +81-44-435-3021
- Process Equipment for Semiconductor / Flat Panel Display
- Semiconductor & LCD Equipment Marketing Division
TEL. +81-44-435-3001 FAX. +81-44-435-3021
- Materials for Flat Panel Display
- Display Material Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022
- Materials for Package Module
- Image-forming Products Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022
* Business Hours 8:45 - 12:00 13:00 - 17:30 in Japan (Except for Saturday, Sunday, National Holidays and Our Company Holidays) |