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HOME > News Release > Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Korea2003

News Release

[ January/09/2003 ]
Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at SEMICON Korea2003

This exhibition was successfully ended. We are grateful to you for your visiting our booth.

Exhibit Dates : Tuesday, January 21 - Thursday, January 23, 2003
Exhibit Products :
State of the Art Photoresists for Semiconductor
  • For Electron Beam (EPL / Cr Mask)
  • For F2 Excimer Laser (157nm)
  • For ArF Excimer Laser (193nm)
  • For KrF Excimer Laser (248nm) (HAER / LAER)
Low-k Materials & Equipment for Low-k Materials
  • Low-k Spin-on Planarization Source
  • Stripping Solution for Low-k Materials
    (Etching Residues [Contains Si / Cu], Photoresist / Etching Residues [Contains Si / Cu])
  • Spin-Coater for Low-k Materials
  • Ashing Machine for Low-k Materials
Process Equipment for Semiconductor
  • Low-Damage Ashing Machine for 300mm Wafer
  • Low-Damage Ashing Machine for 200mm Wafer
  • Low-Damage Etching Machine for 200mm Wafer
  • Spin Coater for 300mm Wafer
  • Spin Coater for 200mm Wafer
  • Thick Film Forming Coater / Developer
  • Multi-usage Coater / Developer
Photoresists & Equipment for Package Modules
  • Photoresists for Wafer Level CSP
    (Metal Post / Bump / Re-Wiring)
  • hotoresists for COF / Tape CSP / TAB
    (Cu Wiring / Through-Hole Filling-in Process[Back Coat])
  • Thick Film Forming Coater / Developer for CSP
Photoresists for Flat Panel Display
  • For TFT LCD
  • For Forming Black Matrix of Color Filter
  • For Forming Barrier Rib of PDP (DFR)
  • For Forming Cathode Separator (Reverse Taper Shape) of Organic ELD EL Display
Process Equipment for Flat Panel Display
  • Spinless Coater System
    (Applicable to 1100 by 1300mm class substrate)
  • Coat & Spin® Coater System
    (Applicable to 1100 by 1300mm class substrate)
  • Coat & Spin® Coater / Developer System
    (Applicable to 730 by 920mm class substrate)
  • Coat & Spin® Coater System
    (Applicable to 850 by 1000mm / 730 by 920mm / 650 by 750mm / 450 by 550mm / 370 by 470mm class substrate)
Contact :
Materials for Semiconductor
Electronic Material Marketing Division 2
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Process Equipment for Semiconductor / Flat Panel Display
Semiconductor & LCD Equipment Marketing Division
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Materials for Flat Panel Display
Display Material Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022
Materials for Package Module
Image-forming Products Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022

* Business Hours 8:45 - 12:00 13:00 - 17:30 in Japan
(Except for Saturday, Sunday, National Holidays and Our Company Holidays)