Tokyo Ohka Kogyo Co., Ltd. (TOK) provides chemical products, such as photoresist, and equipment needed to manufacture semiconductors and flat panel displays (FPD).

State of the Art Photoresists for Semiconductor

• For ArF Excimer Laser (193nm)
• For KrF Excimer Laser (248nm)
• For i-Line
• For g-Line

Resolution Enhancing Process for Semiconductor

• Materials for Resolution Enhancing Process
  (For ArF / KrF / i-line)

Low-k Materials

• Low-k Spin-on Planarization Source

Photoresists & Equipment for MEMS / CSP / BUMP (Package Modules)

• Photoresists for Wafer Level CSP
  (Metal Post / Bump / Re-Wiring)
• Photoresists for LCD Driver IC / Flip Chip Bump Forming Process
• Photoresists for COF / Tape CSP / TAB
• Non-Spin Coater for High Thick Film Forming Process

Photoresists for Flat Panel Display

• Photoresist for TFT LCD
• Photoresist for Forming Black Matrix of Color Filter

Process Equipment for LCD

• Coater System “Spinless” TR130000 S Series
  (Applicable to 2,200 by 2,500mm class substrate)
• Coater System “Spinless” TR117000 S Series
  (Applicable to 1,950 by 2,250mm class substrate)
• Coater System “Spinless” TR90000 S Series
  (Applicable to 1,500 by 1,850mm class substrate)
• Coater / Developer System “Spinless” TRD90000 S Series
  (Applicable to 1,500 by 1,850mm class substrate)

Materials for Semiconductor

Electronic Material Marketing Div. 2
TEL. +81-44-435-3001 FAX. +81-44-435-3021

Process Equipment

Semiconductor & LCD Equipment Marketing Div.
TEL. +81-44-435-3001 FAX. +81-44-435-3021

Materials for LCD

LCD Material Marketing Divi.
TEL. +81-44-435-3002 FAX. +81-44-435-3022

Materials for MEMS / CSP / BUMP (Package Modules)

PDP Packaging Material Marketing Div.
TEL. +81-44-435-3002 FAX. +81-44-435-3022

* Business Hours 8:45 - 12:00 13:00 - 17:30 in Japan
(Except for Saturday, Sunday, National Holidays and Our Company Holidays)

Representative Office
Tokyo Ohka Kogyo Co., Ltd. Shanghai Representative Office

TEL. +86-21-5840-8800 FAX. +86-21-5840-8884