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HOME > News Release > Tokyo Ohka Kogyo America, Inc. Will Exhibit at SPIE Advanced Lithography 2007 Exhibition.

News Release

[ February/16/2007 ]
Tokyo Ohka Kogyo America, Inc. Will Exhibit at SPIE Advanced Lithography 2007 Exhibition.

This exhibition was successfully ended. We are grateful to you for your visiting our booth.

Exhibit Dates : Tuesday, February 27 - Wednesday, February 28, 2007
Show Hours : February 27; 10:00 - 17:00 February 28; 10:00 - 16:00
Venue : San Jose Convention Center - San Jose, California USA
Booth No. : No. 913
Exhibit Products :
State of the Art Photoresists for Semiconductor
  • For EUV
  • For Electron Beam (Semiconductor Application)
  • For ArF Excimer Laser (193nm) Immersion Lithography
  • For ArF Excimer Laser (193nm)
  • For KrF Excimer Laser (248nm)
Resolution Enhancing Process for Semiconductor
  • Materials for ArF Multilayer Process (Photoresist / Middle Layer Material / Bottom Layer Material)
  • Materials for ArF Bilayer Process (Photoresist / Bottom Layer Material)
  • Materials for Resolution Enhancing Process (For ArF / KrF)
Materials for Semiconductor Photolithography
  • Etching Residues Stripping Solution
    (For Al Process / Cu Process / Al, Cu Process)
  • Non PFOS TARC (For ArF / KrF / i-line)
  • Low-k Materials (SOG)
Photoresists for Semiconductor Packaging
  • High Thick Film Chemically Amplified Positive Photoresist for Gold Bumping
  • High Flexibility Positive Photoresist for TAB / COF
  • High Thick Film Chemically Amplified Positive Photoresist for Sn / Ag, Cu Bumping
  • High Resolution Positive Photoresist for Cu Wiring Plating
Photoresists for MEMS (High Aspect Ratio Performance Thick Film Photoresists)
  • Chemically Amplified Negative Permanent Photoresist
  • Non-antimonite Chemically Amplified Negative Permanent Photoresist
Equipment for MEMS / Semiconductor Packaging (CSP / BUMP)
  • Non-Spin Coater for Super Thick Film Forming Process
Materials & Equipment for Wafer Thinning Process
  • Wafer Bonding Machine
  • Bonding Agent
  • Wafer Removing Machine
  • Removing Agent
Contact :
TOKYO OHKA KOGYO AMERICA, INC.
Corporate Sales Office
TEL. +1-408-956-9901 FAX. +1-408-956-9995

* Business Hours 8:00 - 12:00 13:00 - 17:00 (Pacific Standard Time)
(Except for Saturday, Sunday, National Holidays and Our Company Holidays)

Materials for Semiconductor
Electronic Material Marketing Division 2
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Process Equipment
Semiconductor & LCD Equipment Marketing Division
TEL. +81-44-435-3001 FAX. +81-44-435-3021
Materials for MEMS / Semiconductor Packaging (CSP / BUMP)
PDP Packaging Material Marketing Division
TEL. +81-44-435-3002 FAX. +81-44-435-3022
Materials & Equipment for Wafer Thinning Process
Business Development Section
TEL. +81-44-435-3001 FAX. +81-44-435-3021

* Business Hours 8:45 - 12:00 13:00 - 17:30 in Japan
(Except for Saturday, Sunday, National Holidays and Our Company Holidays)