Semiconductor Manufacturing Field
Microprocess technology, such as photoresist,
is supporting advancement in the electronics field.
From micrometer to cutting-edge nanometer features, TOK provides optimal photoresists and related equipment tailored to the production of various semiconductor devices
Photoresists
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Rubber type Negative photoresist
- OMR series
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Photoresist for g-line
- OFPR series
- TSMR series
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Photoresist for i-line
- TSCR series
- THMR-iP series
- TDMR-AR series
- TSMR-iN series
-
Photoresist for KrF
- TDUR-P series
- TDUR-N series
- TGMR-DP series
-
Photoresist for ArF
- TARF-P series
-
Photoresist for ArF Immersion
- TARF-PI series
-
Photoresist for EUV
-
Electron beam photoresist
- OEBR series
Photolithography Relative Chemicals
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Interlayer Insulating Film
- OCD series
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Spin-On diffusion source
- PBF series
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Materials for Cover Coat
- OFR series
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Materials for Directed Self Assembly
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Other materials
- TPF (High-purity aqueous resin solution)
-
Developing solution, Stripping solution, and Thinner