TOKYO OHKA KOGYO CO., LTD. (TOK) provides chemical products, such as photoresist, and equipment for semiconductors and liquid crystal displays.

Materials

Semiconductor Manufacturing Field

Products

Microprocess technology, such as photoresist,
is supporting advancement in the electronics field.

From micrometer to cutting-edge nanometer features, TOK provides optimal photoresists and related equipment tailored to the production of various semiconductor devices

Photoresists

  • Rubber type Negative photoresist
    • OMR series
  • Photoresist for g-line
    • OFPR series
    • TSMR series
  • Photoresist for i-line
    • TSCR series
    • THMR-iP series
    • TDMR-AR series
    • TSMR-iN series
  • Photoresist for KrF
    • TDUR-P series
    • TDUR-N series
    • TGMR-DP series
  • Photoresist for ArF
    • TARF-P series
  • Photoresist for ArF Immersion
    • TARF-PI series
  • Photoresist for EUV
  • Electron beam photoresist
    • OEBR series

Photolithography Relative Chemicals

  • Interlayer Insulating Film
    • OCD series
  • Spin-On diffusion source
    • PBF series
  • Materials for Shrink Process
    • ASF series
  • Materials for Cover Coat
    • OFR series
  • Materials for Directed Self Assembly
  • Other materials
    • TPF (High-purity aqueous resin solution)
  • Developing solution, Stripping solution, and Thinner