TOKYO OHKA KOGYO CO., LTD. (TOK) provides chemical products, such as photoresist, and equipment for semiconductors and liquid crystal displays.

Equipment

Semiconductor Manufacturing Field

Products

Microprocess technology, such as photoresist,
is supporting advancement in the electronics field.

From micrometer to cutting-edge nanometer features, TOK provides optimal photoresists and related equipment tailored to the production of various semiconductor devices

Coating machines

  • CS series
    Coating machines CS series

    Spin coaters with high functionality achieving cost effectiveness.

    • Applicable to 100 / 125 / 150 / 200 / 300 mm Wafers
  • SOD / Photoresist Spin Coater TR6133UD
    • Applicable to 75 / 100 / 125 / 150 / 200 mm Wafers

Developing machines

  • CSH series
    Developing machines CSH series

    Automatic developing machines for single wafer processing with excellent production efficiency.

    • Applicable to 150 / 200 / 300 mm Wafers

Vacuum UV hardning machines

  • TVC-8000 series
    Vacuum UV hardning machines TVC-8000 series

    Vacuum UV hardening machines with better heat resistance, etching property and plating resistance.

    • Applicable to 100 / 125 / 150 / 200 mm Wafers

Chemical supply system

  • Automatic Developer Diluting and Supplying Machine TAS-1000 series

    Chemical supply system that automatically conduct dilution and concentration controlling, focusing on the cost advantage of using a large volume of developing solution.

  • Automatic Developer Concentration Controlling and Supplying Machine TADR-2000 series
  • Automatic Chemical Supplying Machine OS series