Japanese

Products

Semiconductor Manufacturing Field

Microprocess technology, such as photoresist, is supporting advancement in the electronics field.

From micrometer to cutting-edge nanometer features, TOK provides optimal photoresists and related equipment tailored to the production of various semiconductor devices

Coating machines

  • CS series
    Coating machines CS series

    Spin coaters with high functionality achieving cost effectiveness.

    • Applicable to 100 / 125 / 150 / 200 / 300 mm Wafers
  • SOD / Photoresist Spin Coater TR6133UD
    • Applicable to 75 / 100 / 125 / 150 / 200 mm Wafers

Developing machines

  • CSH series
    Developing machines CSH series

    Automatic developing machines for single wafer processing with excellent production efficiency.

    • Applicable to 150 / 200 / 300 mm Wafers

Vacuum UV hardning machines

  • TVC-8000 series
    Vacuum UV hardning machines TVC-8000 series

    Vacuum UV hardening machines with better heat resistance, etching property and plating resistance.

    • Applicable to 100 / 125 / 150 / 200 mm Wafers

Chemical supply system

  • Automatic Developer Diluting and Supplying Machine TAS-1000 series

    Chemical supply system that automatically conduct dilution and concentration controlling, focusing on the cost advantage of using a large volume of developing solution.