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Technologies

Materials for Nano Imprint

Introducing one of our micro patterning solutions by usingthe room temperature imprint for the practical use.

TOK's cutting-edge technology provides various solutions in the nano imprint field for a wide range of customer needs.

HSQ (Inorganic) Material for Nano Imprint

Outstanding Features
  • Excellent thermal resistance (above 1000 degree C)
  • Low dielectronic constant (ε =3.0 - 3.1) <400 degree C>
Profiles

Room temperature imprint

Room temperature

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