TOKYO OHKA KOGYO CO., LTD. (TOK) provides chemical products, such as photoresist, and equipment for semiconductors and liquid crystal displays.

Materials for Nano Imprint

Materials for Nano Imprint


Introducing one of our micro patterning solutions by using
the room temperature imprint for the practical use.

TOK's cutting-edge technology provides various solutions in the nano imprint field for a wide range of customer needs.

HSQ (Inorganic) Material for Nano Imprint

Outstanding Features
  • Excellent thermal resistance (above 1000 degree C)
  • Low dielectronic constant (ε =3.0 - 3.1) <400 degree C>

Room temperature imprint

Room temperature

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Materials for Nano Imprint