東京応化工業(tok)は、半導体や液晶ディスプレイの製造に必要なフォトレジストなどの化学薬品、製造装置を提供している会社です。

Materials for Nano Imprint

Materials for Nano Imprint

Technologies

Introducing one of our micro patterning solutions by using
the room temperature imprint for the practical use.

TOK's cutting-edge technology provides various solutions in the nano imprint field for a wide range of customer needs.

HSQ (Inorganic) Material for Nano Imprint

Outstanding Features
  • Excellent thermal resistance (above 1000 degree C)
  • Low dielectronic constant (ε =3.0 - 3.1) <400 degree C>
Profiles

Room temperature imprint

Room temperature

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Materials for Nano Imprint