Materials for Nano Imprint
Introducing one of our micro patterning solutions by using
the room temperature imprint for the practical use.
TOK's cutting-edge technology provides various solutions in the nano imprint field for a wide range of customer needs.
HSQ (Inorganic) Material for Nano Imprint
- Excellent thermal resistance (above 1000 degree C)
- Low dielectronic constant (ε =3.0 - 3.1) <400 degree C>
Room temperature imprint