TOKYO OHKA KOGYO CO., LTD. (TOK) provides chemical products, such as photoresist, and equipment for semiconductors and liquid crystal displays.

Equipment

Semiconductor Packaging and MEMS Manufacturing Field

Products

TOK's unique packaging / MEMS manufacturing technologies
widely support the manufacturing of more compact electronics.

Offering TOK’s unique packaging / MEMS manufacturing technologies, in terms of both materials and equipment, that widely support the manufacturing of lighter, thinner and more compact mobile devices and electronic components with high functionality

Coating machines

  • CS series
    Coating machines CS series

    Spin coaters with high functionality achieving cost effectiveness.

    • Applicable to 100 / 125 / 150 / 200 / 300 mm Wafers

Developing machines

  • CSH series
    Developing machines CSH series

    Automatic developing machines for single wafer processing with excellent production efficiency.

    • Applicable to 150 / 200 / 300 mm Wafers

Vacuum UV hardning machines

  • TVC-8000 series
    Vacuum UV hardning machines TVC-8000 series

    Vacuum UV hardening machines with better heat resistance, etching property and plating resistance.

    • Applicable to 100 / 125 / 150 / 200 mm Wafers