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LCD glass substrates are becoming larger along with the increasing size of LCDs used in TV sets and personal computers. Thus far, we have devised spin coater “Coat & Spin(Note1)” and many other new types of technology that have contributed to the advancement of the LCD industry. The spin coater of our development is now the de-facto industry standard.
This spin coater rotates the substrate at a high speed and simultaneously coats it with photoresist. However, there are increasingly high technical barriers to rotation of large glass substrates, and the building of larger coaters applying the spin process is thought to be structurally and physically unfeasible.
Drawing on the wealth of know-how we acquired over many years, we have created a new Non-spin technology that solves these problems and can be applied to coat large glass substrates of the fifth and succeeding generations. We are now developing coaters “Spinless” applying this technology for the eighth generation on the heels of those for the fifth, sixth and seventh.
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