Spinless New_Technologies New_Technologies
Spinless HOME "Spinless" Coating Features of the Spinless

Features of the Spinless
Accommodation of larger substrate sizes of the fifth and succeeding generations
Reduction of over 60% in the amount of photoresist use
40% smaller footprint (decrease in the number of process steps)
90% reduction in the amount of cleaning solution and rinse use Reduction of utility costs
*
 Compared with conventional spin coater “Coat & Spin”.
The Non-spin coater “Spinless” has a structure to cope with large glass substrates and deliver coating with the requisite high precision.They also enable a substantial reduction in the amount of cleaning solution and rinse use and in utility costs. They are therefore environment-friendly and do much to cut manufacturing costs.



Reduction in the amount of photoresist use
The Non-spin coater “Spinless” reduces the amount of photoresist use by over 60 %. (Compared with conventional spin coater “Coat & Spin”.)


Spinless_90%OFF(Compared with Center Dispense)
 Coat & Spin_70%OFF(Compared with Center Dispense)
Compared with our conventional equipment
Comparison of the amounts of photoresist use
(Note) The amount of photoresist use varies depending on the film thickness and type of material.



Smaller footprint (reduction in the number of process steps)
The decrease in the number of units made the footprint 40 % smaller as compared to the conventional process.
Sample configuration of the Spinless

Sample configuration of the Coat & Spin
Copyright (C) 1999-2009 TOKYO OHKA KOGYO CO., LTD. All Rights Reserved.