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The process using SAFIER is capable of application even in fields other than semiconductors |
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The process using SAFIER can be applied in non-semiconductor fields such as data storage and micro-electromechanical systems (MEMS).
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Example: patterning in processing of a magnetic head for a data storage unit
For EB with EP-GM Series
Trench 70 nm –› 40 nm
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Initial |
1 time |
2 times |
3 times |
After Removal of
SAFIER
120 °C
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| C.D. |
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70 nm |
58 nm |
48 nm |
41 nm |
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