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The process using SAFIER can be performed more than once |
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It is possible to apply the process using SAFIER over and over times, which result is even finer patterns.
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For KrF with TDUR-P7000 Series
Contact Hole 180 nm –› 120 nm
After removal of
SAFIER
130 °C
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| Initial |
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1 time |
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2 times |
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3 times |
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Pitch
420 nm |
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Pitch
1,540 nm |
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| C.D. |
180 nm |
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160 nm |
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140 nm |
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120 nm |
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