SAFIER New Technologies
SAFIER_HOME Process Flow Mechanism Features Data
Process flow

The process is simple, yet forms an excellent micropattern.
It can be applied on the production lines already installed, and does not entail a lot of additional investment.


1. Photoresist Coating
1.Photoresist Coating
2. Photoresist Patterning
2.Photoresist PatterningPhotoresist Patterning SEM
3. SAFIER Coating
3.SAFIER Coating


4. Heating
4.HeatingHeating SEM
5. SAFIER Removing
5.SAFIER RemovingSAFIER Removing SEM
Copyright (C) 1999-2009 TOKYO OHKA KOGYO CO., LTD. All Rights Reserved.