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HOME > Products > Line-up of Materials & Equipment : Semiconductor Packaging Field

Products

Line-up of Materials & Equipment

PAGE INDEX
Materials
Photoresists for Semiconductor Packaging (CSP / BUMP)
  • High Thick Film Chemically Amplified Positive Photoresist for Gold Bumping
  • High Sensitivity Thick Film Positive Photoresist for Thick Film Plating
  • Thick Film Positive Photoresist for Re-Wiring Patterning Process (Plating Method) of Wafer Level CSP
  • High Flexibility Positive Photoresist for TAB / COF
Photoresists for Through Silicon Via (TSV)
  • SiO2 Etching Photoresist for TSV
  • Via Fill Photoresist for TSV
  • Bump Photoresist for TSV
Materials for Photolithography
  • Photoresist Stripping Solution
  • Photoresist Developing Solution
  • Rinsing Solution
  • Thinner
Equipment
Equipment for Semiconductor Packaging (CSP / BUMP)
CS Series

CS Series

  • CS Series [Applicable to 100, 125, 150, 200, 300 mm Wafers] (Photoresist Spin Coater System)
  • CSA Series [Applicable to 100, 125, 150, 200, 300 mm Wafers] (Non Spin Coater System for Super Thick Film Forming Process)
  • CSH Series [Applicable to 150, 200, 300 mm Wafers] (High-speed Photoresist Developing System)
  • TVC-8000 Series [Applicable to 100, 125, 150, 200 mm Wafers] (Vacuum UV Hardening Machine)
Materials & Equipment for Wafer Thinning Process
TWM Series

▲TWM Series

TWR Series

▲TWR Series

  • TWM Series [Applicable to 150, 200, 300 mm Wafers] (Wafer Bonding Machine)
  • Removable Adhesive
  • TWR Series [Applicable to 150, 200, 300 mm Wafers] (Support Plate Debonding Machine)