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HOME > News Release > Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at Semiconductor Manufacturing Technology Forum 2002 Visual Corner

News Release

[ September/11/2002 ]
Tokyo Ohka Kogyo Co., Ltd. Will Exhibit at Semiconductor Manufacturing Technology Forum 2002 Visual Corner

This exhibition was successfully ended. We are grateful to you for your visiting our booth.

Exhibit Dates : Monday, October 7 - Tuesday, October 8, 2002
Exhibit Products :
Photoresists for Semiconductor
  • For EUV
  • For Electron Beam (EPL)
  • For F2 Laser
  • For ArF Excimer Laser
  • For ArF Excimer Laser (for Bi-layer Process)
  • For KrF Excimer Laser (L/S, ISO, C/H)
  • For KrF Excimer Laser (for Damascene Process)
  • For KrF Excimer Laser (for Bi-layer Process)
  • For KrF Excimer Laser (Negative-Type)
  • For i-line (L/S, C/H, Thin Film Implant Process, Metal Layer, TiN, Al, High Energy Implant)
  • For i-line (Negative-Type)
Other Products for Semiconductor
  • Thinner for Semiconductor
Low-k Materials
  • Low-k Spin on Inorganic Planarization Source
  • Low-k Spin on Organic Planarization Source
Photoresists for Flat Panel Display
  • Pigment Dispersed-Type Photoresist for Forming Black Matrix
  • Dry Film Resist for Barrier Rib Forming Sand-Blast Process (for PDP)
  • Photoresist for Forming Cathode Separator (for Organic ELD)
Photoresists for CCD Camera
  • Photoresist for Micro Lens
Photoresists for Magnetic Head
  • For Write Layer (for Electron Beam / Positive-Type)
  • For Read Layer (for Electron Beam / Negative-Type)
  • For Write Layer (for KrF Excimer Laser)
  • For Write Layer (for i-line)
Photoresists for Wafer Level CSP
  • Highly Thick Film Photoresist for Forming Gold Bump
  • Highly Thick Film Photoresist for Forming Metal Post
  • Highly Thick Film Photoresist for Redistribution Plating Process

For further information about Semiconductor Equipment Association of Japan (SEAJ), please visit their Homepage.